For example, the Y-branch is used to split or combine the thermo-optic MZI [ 146], with an extinction ratio of −16.

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Moreover, the introduction of an inclined grating ( Figure 2C) on the basis of the MMI coupling structure can achieve accurate control of the structural anisotropy and allow independent selection of the beat length of two orthogonal polarization states. In the paper [ 143], Chen Kaixuan proposed using 3dB splitter and optical switch to simultaneously control and route multiple modes, which is of great significance in simplifying network system routing, sharing switch resources, reducing power consumption and reducing size. By changing it without changing its symmetry, polarization beam splitting and multi-channel power beam splitting can be realized. Design and experimental analysis of multimode interference-based optical splitter for on-chip optical interconnects. Cheng L, Mao S, Mu X, Wu S, Fu HY, Dual-wavelength-band multiplexed grating coupler on multilayer SiN-on-SOI photonic integrated platform.Compared with other devices, it has the advantages of lower insertion loss, wider frequency band, easier fabrication process and better tolerance. In recent years, for different separation characteristics, a number of improved designs for multimode waveguides have emerged, which can efficiently realize the functions of power beam splitting [ 60– 67], polarization beam splitting [ 52– 59], wavelength division multiplexing (WDM) [ 110– 114], mode division multiplexing (MDM) [ 68, 115, 116], and the power splitter based on MMI coupling is easy to realize polarization-insensitive design.

Methods and applications of on-chip beam splitting: A review

By analyzing the propagation of the light field and following the existing design principles, multi-channel uniform power output can be realized at the output.

In addition, if the beat length difference between TE and TM polarized light is required to be 0, the purpose of polarization independent design can be achieved [ 108]. For the special design of multimode region, there are mainly two methods: introducing SWG and introducing shallow etching region. Compared with introducing multiple etch points in multimode structure, changing the edge shape of the splitter by using topology optimization is an effective method to realize compact power beam splitter.

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For example, the input is in vacuum state and the amplitude attenuation channel is simulated [ 151]. It is a passive optical device with many input and output terminals, especially applicable to PON (EPON, GPON, BPON, FTTX, etc.Broadband TM-mode-pass polarizer and polarization beam splitter using asymmetrical directional couplers based on silicon subwavelength grating.

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Firstly, the basic principles of four beam splitting methods are introduced; Secondly, the design methods of beam splitter based on y-branch, MMI coupling, DC and inverse design algorithm are introduced. Another bent DC used in a thermo-optic switch is proposed to replace the multimode interferometers or straight DCs, so that achieves a coupling ratio of 50%:50%, as well as low excess loss over a broadband.Therefore, to ensure the excellent transmission performance of the device and to realize the compact and flexible design of the structure is the forward direction of the splitter based on inverse design. Design and simulation of 4-mode (de)multiplexers implemented in conventional and subwavelength grating Si/SiO2 platforms. YX, ZT, XM, and ZC contributed to the writing of the review, everyone was involved in the drafting and critical revision of the manuscript.